Information and Knowledge Modeling for Computer Supported Micro Electro-mechanical Systems Design and Development

Corresponding author, Email: [email protected] ABSTRACT In this paper, we present a preliminary research effort towards an effective computer support environment for the design and development of micro-electro-mechanical systems (MEMS). We first identify the characteristics of MEMS product design and development processes and examine the state-of-the-art of MEMS Computer-aided Design (CAD) and simulation systems. We then propose a function-(environment-effect)-behavior(principle-state)-form (FEEBPSF) framework based on the NIST core product model and its extensions for modeling MEMS products, and apply the OESM (open embedded system model) developed to model information and knowledge for embedded MEMS design and development. Moreover, in order to tackle the knowledge-intensive tasks of design and development for MEMS products, we develop a general and flexible knowledge repository, called KR-MEMS, based on the FEEBPSF framework and the Unified Modeling Language (UML)/ Extensible Markup Language (XML) model, and integrate KR-MEMS into a web-based MEMS design support system. Throughout the paper, a micro fluidic dispensing device (a biomedical device for drug-delivery) is used as an example to illustrate the concepts, models, and knowledge bases necessary to support the MEMS product design and development.